Spin-coater (ACE-200)
- 담당자
- 이명수
- 설치장소
- 2507-2
- 수량
- 1
용도
A machine used to make uniform thin film onto flat substrates
기본사양
Wafer size(Max.) piece to 4" diameter, 6"
Bowl size 235 m/m Bowl
Bowl material SUS (option: P.P, Tefelon, etc)
Special DC Motor Up & Down free
Step 100 step
Memory storage 100 program
Rotation Speed 0 to 50 ~ 8,000 rpm
Hold Time 1~999sec
Accuracy ± 1 R.P.M
acceleration, deceleration free 3,000 R.P.M/sec
Graphic Fuction Real time for steps (스핀구동 그래픽으로구현)
Power Input AC 220V, 50/60Hz
Vacuum Input -450~-650mmHg (6mm ID / 8mm OD)
Display LCD (Back Light)
System Controller MCU (Digital Microprocess)
Dimension (W X D X H) 320 X 420 X 220 mm
Bowl size 235 m/m Bowl
Bowl material SUS (option: P.P, Tefelon, etc)
Special DC Motor Up & Down free
Step 100 step
Memory storage 100 program
Rotation Speed 0 to 50 ~ 8,000 rpm
Hold Time 1~999sec
Accuracy ± 1 R.P.M
acceleration, deceleration free 3,000 R.P.M/sec
Graphic Fuction Real time for steps (스핀구동 그래픽으로구현)
Power Input AC 220V, 50/60Hz
Vacuum Input -450~-650mmHg (6mm ID / 8mm OD)
Display LCD (Back Light)
System Controller MCU (Digital Microprocess)
Dimension (W X D X H) 320 X 420 X 220 mm